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Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control
dc.contributor.author | Giounanlis, Panagiotis |
dc.contributor.author | Gorreta Mariné, Sergio |
dc.contributor.author | Domínguez Pumar, Manuel |
dc.contributor.author | Pons Nin, Joan |
dc.contributor.author | Feely, Orla |
dc.contributor.author | Blokhina, Elena |
dc.contributor.other | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
dc.date.accessioned | 2017-04-18T10:23:04Z |
dc.date.available | 2017-04-18T10:23:04Z |
dc.date.issued | 2016-05 |
dc.identifier.citation | Giounanlis, P., Gorreta, S., Dominguez, M., Pons, J., Feely, O., Blokhina, E. Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control. "IEEE transactions on circuits and systems II: express briefs", Maig 2016, vol. 64, núm. 2, p. 206-210. |
dc.identifier.issn | 1549-7747 |
dc.identifier.uri | http://hdl.handle.net/2117/103507 |
dc.description | ©2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. |
dc.description.abstract | This work investigates, analytically and experimentally, the effects induced by the use of a first-order sigma-delta (S¿) feedback loop as a control method of dielectric charging for capacitive microelectromechanical systems (MEMS). This technique allows setting of a desired level of net charge in the dielectric of a MEMS device by continuously alternating the polarity of the actuation voltage. This control system displays a number of interesting effects, inherited from S¿ modulation and not usually found in conventional MEMS applications, with the charge-locking phenomenon being the most relevant. The convergence time and the effectiveness of the control method are also investigated and discussed. |
dc.format.extent | 5 p. |
dc.language.iso | eng |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica |
dc.subject.lcsh | Microelectromechanical systems |
dc.subject.lcsh | Electric discharges |
dc.subject.other | Dielectrics |
dc.subject.other | Micromechanical devices |
dc.subject.other | Charge carrier processes |
dc.subject.other | Mathematical model |
dc.subject.other | Capacitance |
dc.subject.other | Discharges (electric) |
dc.subject.other | Electrodes |
dc.title | Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control |
dc.type | Article |
dc.subject.lemac | Sistemes microelectromecànics |
dc.subject.lemac | Descàrregues elèctriques |
dc.contributor.group | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.identifier.doi | 10.1109/TCSII.2016.2563858 |
dc.description.peerreviewed | Peer Reviewed |
dc.relation.publisherversion | http://ieeexplore.ieee.org/abstract/document/7465779/ |
dc.rights.access | Open Access |
local.identifier.drac | 19669898 |
dc.description.version | Postprint (author's final draft) |
local.citation.author | Giounanlis, P.; Gorreta, S.; Dominguez, M.; Pons, J.; Feely, O.; Blokhina, E. |
local.citation.publicationName | IEEE transactions on circuits and systems II: express briefs |
local.citation.volume | 64 |
local.citation.number | 2 |
local.citation.startingPage | 206 |
local.citation.endingPage | 210 |
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