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dc.contributor.authorGiounanlis, Panagiotis
dc.contributor.authorGorreta Mariné, Sergio
dc.contributor.authorDomínguez Pumar, Manuel
dc.contributor.authorPons Nin, Joan
dc.contributor.authorFeely, Orla
dc.contributor.authorBlokhina, Elena
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.identifier.citationGiounanlis, P., Gorreta, S., Dominguez, M., Pons, J., Feely, O., Blokhina, E. Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control. "IEEE transactions on circuits and systems II: express briefs", Maig 2016, vol. 64, núm. 2, p. 206-210.
dc.description©2016 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
dc.description.abstractThis work investigates, analytically and experimentally, the effects induced by the use of a first-order sigma-delta (S¿) feedback loop as a control method of dielectric charging for capacitive microelectromechanical systems (MEMS). This technique allows setting of a desired level of net charge in the dielectric of a MEMS device by continuously alternating the polarity of the actuation voltage. This control system displays a number of interesting effects, inherited from S¿ modulation and not usually found in conventional MEMS applications, with the charge-locking phenomenon being the most relevant. The convergence time and the effectiveness of the control method are also investigated and discussed.
dc.format.extent5 p.
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
dc.subject.lcshMicroelectromechanical systems
dc.subject.lcshElectric discharges
dc.subject.otherMicromechanical devices
dc.subject.otherCharge carrier processes
dc.subject.otherMathematical model
dc.subject.otherDischarges (electric)
dc.titleSigma-delta effects and charge locking in capacitive MEMS under dielectric charge control
dc.subject.lemacSistemes microelectromecànics
dc.subject.lemacDescàrregues elèctriques
dc.contributor.groupUniversitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.description.peerreviewedPeer Reviewed
dc.rights.accessOpen Access
dc.description.versionPostprint (author's final draft)
local.citation.authorGiounanlis, P.; Gorreta, S.; Dominguez, M.; Pons, J.; Feely, O.; Blokhina, E.
local.citation.publicationNameIEEE transactions on circuits and systems II: express briefs

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