Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control
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This work investigates, analytically and experimentally, the effects induced by the use of a first-order sigma-delta (S¿) feedback loop as a control method of dielectric charging for capacitive microelectromechanical systems (MEMS). This technique allows setting of a desired level of net charge in the dielectric of a MEMS device by continuously alternating the polarity of the actuation voltage. This control system displays a number of interesting effects, inherited from S¿ modulation and not usually found in conventional MEMS applications, with the charge-locking phenomenon being the most relevant. The convergence time and the effectiveness of the control method are also investigated and discussed.
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CitationGiounanlis, P., Gorreta, S., Dominguez, M., Pons, J., Feely, O., Blokhina, E. Sigma-delta effects and charge locking in capacitive MEMS under dielectric charge control. "IEEE transactions on circuits and systems II: express briefs", Maig 2016, vol. 64, núm. 2, p. 206-210.
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