Study of femtosecond laser beam focusing in a direct-write system

Abstract

Direct-write techniques appear as a versatile option in rapid-prototyping applications because they can directly transfer a custom pattern from a digital file. Lasers are a distinguished tool which allow to perform non-contact direct-write techniques with the ability to add, remove and modify different types of materials. Moreover, they have a high focusing power and offer high spatial resolution when a femtosecond laser is used due to the reduction of thermal effects. Additive and subtractive techniques can be performed in one laser-based direct-write system with minimum variations in the setup. In all cases, properties of the laser beam, such as the beam width or the morphology of the intensity distribution have an effect on the results of the laser processing. The aim of this work is the study of the laser propagation in a specific laser-based direct-write setup. The beam intensity distribution effects are measured at different positions and compared with simulations. The influence of the main parameters, pupil displacement and objective tilt, on the morphological properties of the intensity distribution is analysed. Well defined spots with good reproducibility are obtained. In addition, at comparing the simulation with the experiments, the origin of some morphological properties are reported and they can be used to optimize the setup.