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Three-dimensional measurements with a novel technique combination of confocal and focus variation with a simultaneous scan
dc.contributor.author | Matilla, Aitor |
dc.contributor.author | Mariné, Jordi |
dc.contributor.author | Perez, J. |
dc.contributor.author | Cadevall Artigues, Cristina |
dc.contributor.author | Artigas Pursals, Roger |
dc.contributor.other | Universitat Politècnica de Catalunya. Departament d'Òptica i Optometria |
dc.date.accessioned | 2017-03-09T16:08:32Z |
dc.date.available | 2017-03-09T16:08:32Z |
dc.date.issued | 2016 |
dc.identifier.citation | Matilla, A., Mariné, J., Perez, J., Cadevall, C., Artigas, R. Three-dimensional measurements with a novel technique combination of confocal and focus variation with a simultaneous scan. A: Optical Micro- and Nanometrology. "Optical Micro-and Nanometrology VI: 5-7 April 2016, Brussels, Belgium". Brussels: International Society for Photo-Optical Instrumentation Engineers (SPIE), 2016. |
dc.identifier.isbn | 978-1-5106-0135-2 |
dc.identifier.uri | http://hdl.handle.net/2117/102238 |
dc.description.abstract | The most common optical measurement technologies used today for the three dimensional measurement of technical surfaces are Coherence Scanning Interferometry (CSI), Imaging Confocal Microscopy (IC), and Focus Variation (FV). Each one has its benefits and its drawbacks. FV will be the ideal technology for the measurement of those regions where the slopes are high and where the surface is very rough, while CSI and IC will provide better results for smoother and flatter surface regions. In this work we investigated the benefits and drawbacks of combining Interferometry, Confocal and focus variation to get better measurement of technical surfaces. We investigated a way of using Microdisplay Scanning type of Confocal Microscope to acquire on a simultaneous scan confocal and focus Variation information to reconstruct a three dimensional measurement. Several methods are presented to fuse the optical sectioning properties of both techniques as well as the topographical information. This work shows the benefit of this combination technique on several industrial samples where neither confocal nor focus variation is able to provide optimal results. |
dc.language.iso | eng |
dc.publisher | International Society for Photo-Optical Instrumentation Engineers (SPIE) |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/es/ |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Instrumentació i mesura |
dc.subject | Àrees temàtiques de la UPC::Ciències de la visió::Òptica física |
dc.subject.lcsh | Confocal microscopy |
dc.subject.lcsh | Optical measurements |
dc.subject.lcsh | Multisensor data fusion |
dc.subject.lcsh | Scanning systems |
dc.subject.other | Commerce |
dc.subject.other | Electric power transmission networks |
dc.subject.other | Housing |
dc.subject.other | Power control |
dc.subject.other | Power markets - Reactive power |
dc.subject.other | Different voltages |
dc.subject.other | Distribution grid |
dc.subject.other | Distribution grid planning |
dc.subject.other | Distribution systems |
dc.subject.other | Hosting capacity |
dc.subject.other | Performance indicators |
dc.subject.other | Photovoltaic systems |
dc.subject.other | Reverse Power flows |
dc.title | Three-dimensional measurements with a novel technique combination of confocal and focus variation with a simultaneous scan |
dc.type | Conference report |
dc.subject.lemac | Òptica -- Mesuraments |
dc.subject.lemac | Escombratge, Tècniques d' |
dc.contributor.group | Universitat Politècnica de Catalunya. GREO - Grup de Recerca en Enginyeria Òptica |
dc.identifier.doi | 10.1117/12.2227054 |
dc.relation.publisherversion | http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2518777 |
dc.rights.access | Open Access |
local.identifier.drac | 18852130 |
dc.description.version | Postprint (author's final draft) |
local.citation.author | Matilla, A.; Mariné, J.; Perez, J.; Cadevall, C.; Artigas, R. |
local.citation.contributor | Optical Micro- and Nanometrology |
local.citation.pubplace | Brussels |
local.citation.publicationName | Optical Micro-and Nanometrology VI: 5-7 April 2016, Brussels, Belgium |