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dc.contributor.authorDomínguez Pumar, Manuel
dc.contributor.authorPons Nin, Joan
dc.contributor.authorChávez Domínguez, Juan Antonio
dc.contributor.otherUniversitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica
dc.identifier.citationDominguez, M., Pons, J., Chavez-Dominguez, J. A. MEMS technologies for energy harvesting. A: "Nonlinearity in energy harvesting systems". Berlín: Springer, 2016, p. 23-63.
dc.description.abstractThe objective of this chapter is to introduce the technology of Microelectromechanical Systems, MEMS, and their application to emerging energy harvesting devices. The chapter begins with a general introduction to the most common MEMS fabrication processes. This is followed with a survey of design mechanisms implemented in MEMS energy harvesters to provide nonlinear mechanical actuations. Mechanisms to produce bistable potential will be studied, such as introducing fixed magnets, buckling of beams or using slightly slanted clamped-clamped beams. Other nonlinear mechanisms are studied such as impact energy transfer, or the design of nonlinear springs. Finally, due to their importance in the field of MEMS and their application to energy harvesters, an introduction to actuation using piezoelectric materials is given. Examples of energy harvesters found in the literature using this actuation principle are also presented.
dc.format.extent41 p.
dc.subjectÀrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica
dc.subject.lcshNonlinear systems
dc.subject.lcshEnergy transfer
dc.subject.otherEnergy harvesting
dc.subject.otherCircuits and systems
dc.subject.otherEnergy technology
dc.subject.otherNanotechnology and microengineering
dc.titleMEMS technologies for energy harvesting
dc.typePart of book or chapter of book
dc.subject.lemacSistemes no lineals
dc.subject.lemacTransferència d'energia
dc.contributor.groupUniversitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies
dc.contributor.groupUniversitat Politècnica de Catalunya. GSS - Grup Sistemes Sensors
dc.rights.accessOpen Access
dc.description.versionPostprint (author's final draft)
local.citation.authorDominguez, M.; Pons, J.; Chavez-Dominguez, J. A.
local.citation.publicationNameNonlinearity in energy harvesting systems

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