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Microelectromechanical systems (MEMS). Introduction to MEMS processing

dc.contributor.authorZubrzycki, Jaroslaw
dc.date.accessioned2014-10-06T16:03:58Z
dc.date.available2014-10-06T16:03:58Z
dc.date.issued2014-08
dc.identifier.citationZubrzycki, Jaroslaw. Microelectromechanical systems (MEMS). Introduction to MEMS processing. "Instrumentation viewpoint", Agost 2014, núm. 16, p. 25.
dc.identifier.issn1886-4864
dc.identifier.urihttp://hdl.handle.net/2099/15150
dc.format.extent1
dc.language.isoeng
dc.publisherSARTI
dc.titleMicroelectromechanical systems (MEMS). Introduction to MEMS processing
dc.typeArticle
dc.description.peerreviewedPeer Reviewed
dc.rights.accessOpen Access
local.citation.authorZubrzycki, Jaroslaw
local.citation.publicationNameInstrumentation viewpoint
local.citation.number16
local.citation.startingPage25
local.citation.endingPage25


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