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dc.contributor.authorSáenz, Juan Pablo
dc.date.accessioned2011-02-24T09:52:30Z
dc.date.available2011-02-24T09:52:30Z
dc.date.created2005
dc.date.issued2005
dc.identifier.citationSáenz, Juan Pablo. An Introduction to micro electro mechanical systems (MEMS). "Buran", 2005, núm. 22, p. 13-18.
dc.identifier.issn2013-9713
dc.identifier.urihttp://hdl.handle.net/2099/10090
dc.description.abstractThe remarkable progress ofMEMS (Micro Electro Mechanical Systems) research has reached the stage where practical applications are intensely pursued. Based on highperformance systems cornmercial products have made remarkable progress in many fields. This paper discusses the underlying principIes for MEMS, going over the materials and processes used for their fabrication. It also presents two state of the art examples, under development in the industry. A brief discussion of terminology is also included.
dc.format.extent6 p.
dc.language.isoeng
dc.publisherEscola Tècnica Superior d'Enginyers de Telecomunicació de Barcelona
dc.subjectÀrees temàtiques de la UPC::Enginyeria de la telecomunicació
dc.subject.lcshTelecommunication
dc.titleAn Introduction to micro electro mechanical systems (MEMS)
dc.typeArticle
dc.subject.lemacTelecomunicació -- Revistes
dc.subject.lemacElectrònica
dc.description.peerreviewedPeer Reviewed
dc.rights.accessOpen Access
upcommons.citation.authorSáenz, Juan Pablo
upcommons.citation.publishedtrue
upcommons.citation.publicationNameBuran
upcommons.citation.number22
upcommons.citation.startingPage13
upcommons.citation.endingPage18


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