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dc.contributorSridharan, M.
dc.contributor.authorSerra Torrent, Albert
dc.date.accessioned2014-11-25T19:25:10Z
dc.date.available2014-11-25T19:25:10Z
dc.date.issued2013
dc.identifier.urihttp://hdl.handle.net/2099.1/23960
dc.description.abstractThree types of ZnO based thin films were deposited under different deposition parameters using DC magnetron reactive sputtering technique over glass and n-type (100) highly oriented silicon substrates: un-doped ZnO films, Vanadium doped Zinc Oxide films and Aluminium doped Zinc Oxide films. ZnO:V films were co-sputtered using two different magnetrons with Zinc (99,99%) and Vanadium (99,99%) targets, while pure ZnO and ZnO:Al films were sputtered using a single magnetron, placing an aluminium thin plate over the Zinc target in the case of ZnO:Al films. In all cases oxygen was used as the reactive gas and argon as the inert gas for creating the plasma. Previous to the deposition of the doped films, pure Zinc Oxide and pure Vanadium Oxide films were deposited separately to optimise some of their individual sputtering parameters and for following comparison. After characterization of all the films and result analysis, the most suitable and adjusted sputtering parameters were chosen to fabricate a piezoelectric thin film vibration energy harvesting device. Three different types of films were used for the device fabrication and testing, one un-doped ZnO and two Vanadium doped ZnO films, in order to compare their vibration response and energy harvesting capabilities. For device testing different experiments were carried on including: Ultrasonic vibrations, mobile phone vibrations, cantilever vibrations and knocking induced vibrations. The films showed good piezoelectric activity, generating voltages in the order of tens to hundreds of μV under the different vibration conditions.
dc.language.isoeng
dc.publisherUniversitat Politècnica de Catalunya
dc.publisherSastra University
dc.rightsAttribution-NonCommercial-NoDerivs 3.0 Spain
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/es/
dc.subjectÀrees temàtiques de la UPC::Energies
dc.subjectÀrees temàtiques de la UPC::Enginyeria química::Química física
dc.subject.lcshZinc oxide – Recycling
dc.subject.lcshThin films
dc.subject.lcshEnergy harvesting
dc.subject.lcshSputtering (Physics)
dc.titleStudies on zinc oxide based thin films for energy harvesting applications
dc.typeBachelor thesis
dc.subject.lemacÒxid de zinc -- Reciclatge
dc.subject.lemacPel•lícules fines
dc.subject.lemacEnergia -- Captació
dc.subject.lemacPolvorització (Física)
dc.rights.accessOpen Access
dc.audience.educationlevelGrau
dc.audience.mediatorEscola Tècnica Superior d'Enginyeria Industrial de Barcelona
dc.provenanceAquest document conté originàriament altre material i/o programari no inclòs en aquest lloc web
dc.description.mobilityOutgoing


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