Browsing by Author "Otegi Urdanpilleta, Nerea"
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Study of intermodulation in RF MEMS variable capacitors
Girbau Sala, David; Otegi Urdanpilleta, Nerea; Pradell i Cara, Lluís; Lázaro Guillén, Antoni (IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2006-03-31)
Article
Open AccessThis paper provides a rigorous study of the causes and physical origins of intermodulation distortion (IMD) in RF microelectromechanical systems (MEMS) capacitors, its analytical dependence on the MEMS device design ...