Browsing by Author "Michalik, Piotr"

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    • Monolithic sensor integration in CMOS technologies 

      Fernández, Daniel; Michalik, Piotr; Valle Fraga, Juan José; Banerji, Saoni; Sánchez Chiva, José María; Madrenas Boadas, Jordi (Institute of Electrical and Electronics Engineers (IEEE), 2022-12-09)
      Article
      Open Access
      Besides being mainstream for mixed-signal electronics, CMOS technology can be used to integrate micro-electromechanical system (MEMS) on a single die, taking advantage of the structures and materials available in feature ...