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    • Step height standards based on self-assembly for 3D metrology of biological samples 

      Järvinen, Hannu; Kassamakov, I.; Viitala, T.; Bermúdez Porras, Carlos; Artigas Pursals, Roger; Martínez Marin, Pol (2020-09-01)
      Open Access
      Modern microscopes and profilometers such as the coherence scanning interferometer (CSI) approach sub-nm precision in height measurements. Transfer standards at all measured size scales are needed to guarantee traceability ...