Now showing items 1-3 of 3

  • Control of MEMS vibration modes with pulsed digital Oscillators. Part II: simulation and experimental results 

    Domínguez Pumar, Manuel; Ricart Campos, Jordi; Pons Nin, Joan; Blokhina, Elena; Gorreta, Sergi; Hernando, Jorge; Manzaneque, Tomas; Sanchez Rojas, Jose Luis; Feely, Orla (2010-08)
    Article
    Open Access
    This paper extends our previous work on the selective excitation of mechanical vibration modes in MEMS devices using pulsed digital oscillators (PDOs). It begins by presenting extensive simulation results using the set ...
  • Dielectric charge control in electrostatic MEMS positioners/varactors 

    Blokhina, Elena; Gorreta, Sergi; Lopez, David; Molinero Giles, David; Feely, Orla; Pons Nin, Joan; Domínguez Pumar, Manuel (2012-06)
    Article
    Restricted access - publisher's policy
    A new dynamical closed-loop method is proposed to control dielectric charging in capacitive microelectromechanical systems (MEMS) positioners/varactors for enhanced reliability and robustness. Instead of adjusting the ...
  • Digital resonance for MEMS 

    Ricart Campos, Jordi; Pons Nin, Joan; Gorreta, Sergi; Domínguez Pumar, Manuel (IEEE Press. Institute of Electrical and Electronics Engineers, 2009-02-11)
    Conference report
    Open Access
    This work shows the application of Pulsed Digital Oscillators to the detection of physical changes in MEMS devices that cause small shifts in their resonance frequencies. Such devices can be used as resonators in several ...