Now showing items 1-2 of 2

    • Modelling of a charge control method for capacitive MEMS 

      Giounanlis, Panonios; Blokhina, Elena; Feely, Orla; Domínguez Pumar, Manuel; Pons Nin, Joan; Gorreta Mariné, Sergio (Institute of Electrical and Electronics Engineers (IEEE), 2013)
      Conference report
      Restricted access - publisher's policy
      Charging of dielectric materials in microelectromechanical systems (MEMS) actuated electrostatically is a major reliability issue. In our previous work we proposed a feedback loop control method that is implemented as ...
    • Real-time characterization of dielectric charging in contactless capacitive MEMS 

      Domínguez Pumar, Manuel; Gorreta Mariné, Sergio; Pons Nin, Joan; Blokhina, Elena; Giounanlis, Panonios; Feely, Orla (2015-03-01)
      Article
      Open Access
      This paper presents a new method to characterize the dynamics of the charge trapped in the dielectric layer of contactless microelectromechanical systems. For sampled-time systems, this allows knowing the state of the net ...