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    • Micropower thermoelectric generator from thin Si membranes 

      Pérez Marín, A. P.; Lopeandía, A. F.; Abad, L.; Ferrando-Villaba, P.; López Martínez, Antonio Miguel; García, G.; Muñoz Pascual, F.X.; Rodriguez Viejo, J. (2014-03-23)
      Open Access
      We report the development of a Si-based micro thermogenerator build from silicon-on-insulator by using standard CMOS processing. Ultrathin single-crystalline Si membranes, 100 nm in thickness, with embedded n and p-type ...