Now showing items 1-1 of 1

  • A thickness-shear MEMS resonator employing electromechanical transduction through a coplanar waveguide 

    Johnson, W.L.; Wallis, T.M.; Kabos, P.; Rocas Cantenys, Eduard; Collado Gómez, Juan Carlos; Liew, L.A.; Ha, J.Y.; Davydov, A.V.; Plankis, A.; Heyliger, P.R. (2012)
    Conference report
    Restricted access - publisher's policy
    The design, modeling, fabrication, and characterization of a vibrationally trapped thickness-shear MEMS resonator is presented. This device is intended to avoid various limitations of flexural MEMS resonators, including ...