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    • Curvature of BEOL cantilevers in CMOS-MEMS processes 

      Valle Fraga, Juan José; Fernández Martínez, Daniel; Madrenas Boadas, Jordi; Barrachina, Laura (2017-08-01)
      Open Access
      This paper presents the curvature characterization results of released back-end-of-line 5 µm-wide cantilevers for two different 0.18-µm 1P6M complementary metal-oxide semiconductor microelectromechanical systems processes. ...