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  • Thermal response of AlN and CNx films as coatings of thin film anemometers 

    Arroyo, J.; Silvestre Bergés, Santiago; Coll Valentí, Arnau; Castañer Muñoz, Luis María (2013-05)
    Restricted access - publisher's policy
    Layers of AlN and CNx were investigated as suitable films to coat thin film anemometers because they are simultaneously electrical isolators and thermal conductors. Thermal time constants were measured and thermal equivalent ...