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  • New high sensitivity MEMS sensor for indirect pressure measurement 

    Ruggeri, Massimiliano; Massarotti, Giorgio Paolo; Codina Macià, Esteban (The Japan Fluid Power System Society, 2017)
    Conference report
    Restricted access - publisher's policy
    Sensorization of modern electro-hydraulic systems is one of the key technologies for system observability and controllability. Increasing needs for closed loop controls, high precision, power control and energy monitoring, ...