Exploració per tema "E130"
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Thin film transistors obtained by hot wire CVD
(2000-05)
Article
Accés restringit per política de l'editorialHydrogenated microcrystalline silicon films obtained at low temperature (150–280°C) by hot wire chemical vapour deposition at two different process pressures were measured by Raman spectroscopy, X-ray diffraction (XRD) ...