Exploració per altres contribucions "Pallarés Marzal, Josep"
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Fabrication, characterisation and modelling of nanocrystalline silicon thin-film transistors obtained by hot-wire chemical vapour deposition.
(Universitat Politècnica de Catalunya, 2003-03-31)
Tesi
Accés obertHot-wire chemical vapour deposition (HWCVD) is a promising technique that permits polycrystalline silicon films with grain size of nanometers to be obtained at high deposition rates and low substrate temperatures. This ...