• Multilayer ISFET membranes for microsystems applications 

      Cané, Carles; Götz, A.; Merlos, A.; Gràcia, I.; Errachid, Abdelhamid; Losantos Viñolas, Pedro; Lora-Tamayo, E. (1996-09-01)
      Article
      Accés restringit per política de l'editorial
      The fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal processing circuitry highly desirable. Chemical sensors use sensitive layers which are ...