Browsing by Author "Dosev, Dosi Konstantinov"
Fabrication, characterisation and modelling of nanocrystalline silicon thin-film transistors obtained by hot-wire chemical vapour deposition. Dosev, Dosi Konstantinov (Universitat Politècnica de Catalunya, 2003-03-31)
Open AccessHot-wire chemical vapour deposition (HWCVD) is a promising technique that permits polycrystalline silicon films with grain size of nanometers to be obtained at high deposition rates and low substrate temperatures. This ...