Now showing items 1-5 of 5

    • CMOS BEOL-embedded z-axis accelerometer 

      Michalik, Piotr Jozef; Sánchez Chiva, José María; Fernández Martínez, Daniel; Madrenas Boadas, Jordi (Institution of Electrical Engineers, 2015-05-28)
      Article
      Open Access
      A first reported complementary metal-oxide semiconductor (CMOS)-integrated acceleration sensor obtained through isotropic inter-metal dielectric (IMD) etching of a back-end-of-line (BEOL) integrated circuit interconnection ...
    • CMOS-MEMS resonant pressure sensors: optimization and validation through comparative analysis 

      Banerji, Saoni; Michalik, Piotr Jozef; Méndez Fernández, Daniel; Madrenas Boadas, Jordi; Mola, Albert; Montanyà, Josep (2017-09-01)
      Article
      Open Access
      An optimized CMOS-MEMS resonant pressure sensor with enhanced sensitivity at atmospheric pressure has been reported in this paper. The presented work reports modeling and characterization of a resonant pressure sensor, ...
    • Experiments on MEMS Integration in 0.25 turn CMOS Process 

      Michalik, Piotr Jozef; Fernández, Daniel; Wietstruck, Mehmet; Kaynak, Mehmet; Madrenas Boadas, Jordi (Multidisciplinary Digital Publishing Institute (MDPI), 2018-07-01)
      Article
      Open Access
      In this paper, we share our practical experience gained during the development of CMOS-MEMS (Complementary Metal-Oxide Semiconductor Micro Electro Mechanical Systems) devices in IHP SG25 technology. The experimental ...
    • Result-consistent counter sampling scheme for coarse-fine TDCs 

      Michalik, Piotr Jozef; Fernandez, D.; Madrenas Boadas, Jordi (Institution of Electrical Engineers, 2012-09-13)
      Article
      Restricted access - publisher's policy
    • Sense/Drive Architecture for CMOS-MEMS Accelerometers with Relaxation Oscillator and TDC 

      Michalik, Piotr Jozef; Madrenas Boadas, Jordi; Fernández Martínez, Daniel (IEEE Computational Intelligence Society, 2012)
      Conference report
      Open Access