• A comprehensive high-level model for CMOS-MEMS resonators 

      Banerji, Saoni; Fernández, Daniel; Madrenas Boadas, Jordi (2018-01-24)
      Article
      Accés obert
      This paper presents a behavioral modeling technique for CMOS microelectromechanical systems (MEMS) microresonators that enables simulation of an MEMS resonator model in Analog Hardware Description Language format within a ...
    • Characterization of CMOS-MEMS resonant pressure sensors 

      Banerji, Saoni; Fernández Martínez, Daniel; Madrenas Boadas, Jordi (2017-08-30)
      Article
      Accés obert
      IEEE Comprehensive characterization results of a CMOS-MEMS resonant pressure sensor are presented. We have extensively evaluated the key performance parameters of our device in terms of quality factor (Q) variations under ...
    • CMOS-MEMS resonant pressure sensors: optimization and validation through comparative analysis 

      Banerji, Saoni; Michalik, Piotr Jozef; Méndez Fernández, Daniel; Madrenas Boadas, Jordi; Mola, Albert; Montanyà, Josep (2017-09-01)
      Article
      Accés obert
      An optimized CMOS-MEMS resonant pressure sensor with enhanced sensitivity at atmospheric pressure has been reported in this paper. The presented work reports modeling and characterization of a resonant pressure sensor, ...
    • Monolithic sensor integration in CMOS technologies 

      Fernández, Daniel; Michalik, Piotr; Valle Fraga, Juan José; Banerji, Saoni; Sánchez Chiva, José María; Madrenas Boadas, Jordi (Institute of Electrical and Electronics Engineers (IEEE), 2022-12-09)
      Article
      Accés obert
      Besides being mainstream for mixed-signal electronics, CMOS technology can be used to integrate micro-electromechanical system (MEMS) on a single die, taking advantage of the structures and materials available in feature ...
    • Optimization of parameters for CMOS MEMS resonant pressure sensors 

      Banerji, Saoni; Madrenas Boadas, Jordi; Fernández Martínez, Daniel (Institute of Electrical and Electronics Engineers (IEEE), 2015)
      Text en actes de congrés
      Accés restringit per política de l'editorial
      Micro machined resonant pressure sensors have rapidly grown into a major type of MEMS products over the past two decades. This paper presents the mathematical modelling of squeeze film damping in a MEMS resonant pressure ...
    • Under pressure? Don’t lose direction! Smart sensors: Development of CMOS and MEMS on the same platform 

      Sánchez Chiva, José María; Banerji, Saoni (2016)
      Comunicació de congrés
      Accés obert
      Micro Electro Mechanical Systems (MEMS) are movable structures fabricated on the surface of silicon chips by selectively depositing and etching away materials and silicon. Such movement allows the measurement of a wide ...