Now showing items 1-14 of 14

    • A self-test and dynamics characterization circuit for MEMS electrostatic actuators 

      Fernández Martínez, Daniel; Madrenas Boadas, Jordi; Cosp Vilella, Jordi (2011-03)
      Article
      Restricted access - publisher's policy
      This paper presents a high-bandwidth capacitance estimation and driving circuit especially tailored for its use with MEMS electrostatic actuators. The circuit can be integrated as a part of a system comprising an electrostatic ...
    • A test setup for the characterization of Lorentz-force MEMS magnetometers 

      Sánchez Chiva, José María; Valle Fraga, Juan José; Fernández Martínez, Daniel; Madrenas Boadas, Jordi (2021-09-13)
      Article
      Open Access
      Lorentz-force MEMS magnetometers are interesting candidates for the replacement of magnetometers in consumer electronics products. Plenty of works in the literature propose MEMS magnetometers, their readout circuits and ...
    • Arquitecturas y circuitos CMOS para el control, generación y procesado de señal de MEMS 

      Fernández Martínez, Daniel (Universitat Politècnica de Catalunya, 2008-11-01)
      Doctoral thesis
      Open Access
      En esta tesis se muestran arquitecturas y circuitos CMOS para el control de actuadores electroestáticos MEMS y para la generación y procesado de las señales proveniente de microsistemas. <br/>En el primer capítulo se ...
    • Bioinspired sensory integration for environment-perception embedded systems 

      Madrenas Boadas, Jordi; Fernández Martínez, Daniel; Cosp Vilella, Jordi; Moreno Aróstegui, Juan Manuel; Martínez Alvarado, Luis Arturo; Sánchez Rivera, Giovanny (2011)
      Conference report
      Restricted access - publisher's policy
      In this work, the architecture of a system intended for bioinspired environment perception is described. Considering the technology trends and applications requirements, the properties of such a system are discussed. ...
    • Characterization of CMOS-MEMS resonant pressure sensors 

      Banerji, Saoni; Fernández Martínez, Daniel; Madrenas Boadas, Jordi (2017-08-30)
      Article
      Open Access
      IEEE Comprehensive characterization results of a CMOS-MEMS resonant pressure sensor are presented. We have extensively evaluated the key performance parameters of our device in terms of quality factor (Q) variations under ...
    • Closed-form equation for natural frequencies of beams under full range of axial loads modeled with a spring-mass system 

      Valle Fraga, Juan José; Fernández Martínez, Daniel; Madrenas Boadas, Jordi (2019-04-01)
      Article
      Open Access
      A new simple closed-form equation that accurately predicts the effect of an arbitrarily large constant axial load, residual stress or temperature shift on the natural frequencies of an uniform single-span beam, with various ...
    • CMOS BEOL-embedded z-axis accelerometer 

      Michalik, Piotr Jozef; Sánchez Chiva, José María; Fernández Martínez, Daniel; Madrenas Boadas, Jordi (Institution of Electrical Engineers, 2015-05-28)
      Article
      Open Access
      A first reported complementary metal-oxide semiconductor (CMOS)-integrated acceleration sensor obtained through isotropic inter-metal dielectric (IMD) etching of a back-end-of-line (BEOL) integrated circuit interconnection ...
    • Curvature of BEOL cantilevers in CMOS-MEMS processes 

      Valle Fraga, Juan José; Fernández Martínez, Daniel; Madrenas Boadas, Jordi; Barrachina, Laura (2017-08-01)
      Article
      Open Access
      This paper presents the curvature characterization results of released back-end-of-line 5 µm-wide cantilevers for two different 0.18-µm 1P6M complementary metal-oxide semiconductor microelectromechanical systems processes. ...
    • LCMOS: Light-powered standard CMOS circuits 

      Madrenas Boadas, Jordi; Fernández Martínez, Daniel; Wang, Chunyan (2012)
      Conference report
      Restricted access - publisher's policy
      LCMOS, a harvest-use light-powered scheme for standard CMOS circuits based on photogenerated currents in the drain-substrate PN junction of both PMOS and NMOS transistors is introduced. PMOS and NMOS bulks are ...
    • Manufacturing Issues of BEOL CMOS-MEMS Devices 

      Valle Fraga, Juan José; Fernández Martínez, Daniel; Gibrat, Olivier; Madrenas Boadas, Jordi (Institute of Electrical and Electronics Engineers (IEEE), 2021-06-07)
      Article
      Open Access
      In this paper we present a comprehensive report on the issues found during the manufacturing of high-yield CMOS-MEMS sensors based on vapor-phase hydrogen fluoride (vapor- HF ) oxide etching. During the study we have ...
    • Optimization of parameters for CMOS MEMS resonant pressure sensors 

      Banerji, Saoni; Madrenas Boadas, Jordi; Fernández Martínez, Daniel (Institute of Electrical and Electronics Engineers (IEEE), 2015)
      Conference report
      Restricted access - publisher's policy
      Micro machined resonant pressure sensors have rapidly grown into a major type of MEMS products over the past two decades. This paper presents the mathematical modelling of squeeze film damping in a MEMS resonant pressure ...
    • Self-controlled 4-transistor low-power min-max current selector 

      Madrenas Boadas, Jordi; Fernández Martínez, Daniel; Cosp Vilella, Jordi; Martínez Alvarado, Luis Arturo; Alarcón Cot, Eduardo José; Vidal López, Eva María; Villar Piqué, Gerard (2009-10)
      Article
      Restricted access - publisher's policy
      Four cross-coupled MOS transistors operating as switches implement a very compact, fast, low-power and precise minimum and maximum current selector. Local positive feedback allows the circuit to work without the need of ...
    • Sense/Drive Architecture for CMOS-MEMS Accelerometers with Relaxation Oscillator and TDC 

      Michalik, Piotr Jozef; Madrenas Boadas, Jordi; Fernández Martínez, Daniel (IEEE Computational Intelligence Society, 2012)
      Conference report
      Open Access
    • Translinear signal processing circuits in standard CMOS FPAA 

      Martínez Alvarado, Luis Arturo; Madrenas Boadas, Jordi; Fernández Martínez, Daniel (IEEE Press. Institute of Electrical and Electronics Engineers, 2009-12)
      Conference report
      Open Access
      In this paper, the implementation of signal processing circuits on a novel translinear Field-Programmable Analog Array (FPAA) testchip is reported. The FPAA testchip is based on a 0.35-micron, fully CMOS translinear ...