Capacitive and resistive RF-MEMS switches 2.5D & 3D Electromagnetic and Circuit modelling
Visualitza/Obre
Cita com:
hdl:2117/8890
Tipus de documentText en actes de congrés
Data publicació2009
Condicions d'accésAccés obert
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Abstract
this paper proposes different strategies for the
electrical modelling of capacitive and resistive RF-MEMS
switches which take into account the dependence of the electrical
performance on the mechanical properties and technological
processes. The EM modelling of MEMS switches is addressed
with 2.5D and 3D full wave EM softwares. More specifically,
ADS-MomentumTM (2.5D) and EMDSTM (3D) from Agilent
Technologies are used. Capacitive RF-MEMS switches were
fabricated with the LAAS-CNRS 6-mask RF-MEMS process in
Toulouse, France, and resistive RF-MEMS switches were
fabricated with the FBK-irst 8-mask RF-MEMS process in
Trento, Italy. It is shown that, by applying the proposed
strategies, 2.5D and 3D simulations are in good agreement with
characterization results.
CitacióLlamas, M. [et al.]. Capacitive and resistive RF-MEMS switches 2.5D & 3D Electromagnetic and Circuit modelling. A: Spanish Conference on Electron Devices. "7th Spanish Conference on Electron Devices CDE-2009". Santiago de Compostela: 2009, p. 451-454.
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