Giant Magnetoresistance (GMR) sensors for 0.35µm CMOS technology sub-mA current sensing
Document typeConference report
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Rights accessRestricted access - publisher's policy
This paper reports on the design and fabrication of microelectronic structures for non-invasive indirect electric current sensing at the IC level. A 0.35 ¿m CMOS ASIC has been specifically developed for this purpose. Then, a low temperature post-process, fully compatible with the CMOS technology, has been applied for depositing Giant Magnetoresistive (GMR) sensors. Preliminary experimental results for obtaining the sensitivity of the devices are presented. The detection limit is estimated to be about 5 ¿A.
CitationDe Marcellis, A., Reig, C., Cubells, M., Madrenas, J., Cardoso, F., Cardoso, S., Freitas, P. Giant Magnetoresistance (GMR) sensors for 0.35µm CMOS technology sub-mA current sensing. A: IEEE Conference on Sensors. "IEEE Sensors 2014: proceedings: Valencia, Spain: November 2-5, 2014". València: Institute of Electrical and Electronics Engineers (IEEE), 2014, p. 444-447.
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