This work expands the model proposed by Krimtholz,
Leedom, and Matthaei (KLM) model to account for the nonlinear
effects occurring in acoustic devices due to the nonlinear stiffened
elasticity.We show that a nonlinear distributed capacitance in the
acoustic transmission line of the KLM model can account for the
distributed nature of the nonlinear effects. Specifically, we use the
nonlinear telegrapher’s equation to find closed-form equations for
intermodulation distortion and harmonic generation. We confirm
the validity of these equations by comparing their results with those
provided by aKLMequivalent circuit in which the nonlinear transmission
line is implemented by cascading many L-C cells having
a voltage-dependent capacitance. To further confirm the model, we
show measured nonlinear effects in a thin film bulk acoustic resonator
in close agreement with the equivalent circuit simulations.
CitationCollado, J. [et al.]. Nonlinear distributed model for bulk acoustic wave resonators. "IEEE transactions on microwave theory and techniques", Desembre 2009, vol. 57, núm. 12, p. 3019-3029.
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