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Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates
dc.contributor.author | López Martí, Gema |
dc.contributor.author | Ortega Villasclaras, Pablo Rafael |
dc.contributor.author | Voz Sánchez, Cristóbal |
dc.contributor.author | Martín García, Isidro |
dc.contributor.author | Colina Brito, Mónica Alejandra |
dc.contributor.author | Morales Vilches, Ana Belén |
dc.contributor.author | Orpella García, Alberto |
dc.contributor.author | Alcubilla González, Ramón |
dc.contributor.other | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
dc.date.accessioned | 2015-03-18T16:49:38Z |
dc.date.created | 2013 |
dc.date.issued | 2013 |
dc.identifier.citation | López, G. [et al.]. Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates. A: E-MRS Spring Meeting. "E-MRS 2013 Spring Meeting. Congres Center - Strasbourg, France May 27th - 31st, 2013". Strasbourg: 2013, p. 1. |
dc.identifier.uri | http://hdl.handle.net/2117/26822 |
dc.format.extent | 1 p. |
dc.language.iso | eng |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica |
dc.subject.lcsh | Nanoelectronics |
dc.title | Surface passivation and optical characterization of Al2O3/a-SiCx stacks on c-Si substrates |
dc.type | Other |
dc.subject.lemac | Nanoelectrònica |
dc.contributor.group | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.rights.access | Restricted access - publisher's policy |
local.identifier.drac | 12743780 |
dc.description.version | Postprint (published version) |
dc.date.lift | 10000-01-01 |
local.citation.author | López, G.; Ortega, P.; Voz, C.; Martin, I.; Colina, M.A.; Morales, A.; Orpella, A.; Alcubilla, R. |
local.citation.contributor | E-MRS Spring Meeting |
local.citation.pubplace | Strasbourg |
local.citation.publicationName | E-MRS 2013 Spring Meeting. Congres Center - Strasbourg, France May 27th - 31st, 2013 |
local.citation.startingPage | 1 |
local.citation.endingPage | 1 |