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Measurements of transient currents from the discharge of microelectromechanical capacitive
switches after charging the dielectric with an ion gun are reported. It is shown that both the charge
sign and the charge amount can be independently measured and that the values can be related to the
pull-in shift as measured from C-V characteristics. Several capacitive switches of different sizes
were fabricated and subjected to charging and discharging experiments. The analysis of the
transients shows that several time constants are governing the charge dynamics, one of them is
related to the resistivity-permittivity product of the dielectric.
CitationMolinero, D.; Comulada, R.; Castañer, L. Dielectric charge measurements in capacitive microelectromechanical switches. Applied Physics Letters, 2006, vol. 89, 103506.
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