Rights accessRestricted access - publisher's policy
Depletion region modulation (DRM) effect is often observed in photoconductance lifetime
measurements of crystalline silicon wafers passivated by dielectric films. This effect is closely
related to the space-charge region electrostatically induced by fixed charges within the dielectric.
This study proposes a model for dielectric-passivated c-Si wafers, which includes the DRM effect,
to simulate and fit the effective lifetime vs excess minority carrier density curves obtained by
quasisteady-state photoconductance techniques. The validity of the model is checked by applying it
to different experimental samples, taking particular care of the mobility values of the surface
carriers. It is, thus, demonstrated that the fixed charge within the dielectric film can be determined
with improved accuracy and increased reliability if the DRM effect is included into the model.
CitationGarín, M.; Mrtín, I.; Bermejo, S.; Alcubilla, R. Fixed charge density in dielectrics deposited on c-Si using space charge region dominated lifetime measurements. A: Journal of Applied Phyics, 2007, vol. 101, 123716.
All rights reserved. This work is protected by the corresponding intellectual and industrial property rights. Without prejudice to any existing legal exemptions, reproduction, distribution, public communication or transformation of this work are prohibited without permission of the copyright holder. If you wish to make any use of the work not provided for in the law, please contact: email@example.com