Differential optical feedback interferometry for the measurement of nanometric displacements
Tipus de documentArticle
Condicions d'accésAccés obert
We have recently proposed differential optical feedback interferometry as a convenient method to measure nanometric displacements. In this paper, we present experimental results to support the proposed method. The acquisition system (in particular the conditioning electronics), and, the signal processing algorithm applied to the captured signal, will be described. Obtained results show good agreement with measurements performed using a capacitive sensor employed as reference. © Sociedad Española de Óptica.
CitacióAzcona, F.; Atashkhooei, R.; Royo, S. Differential optical feedback interferometry for the measurement of nanometric displacements. "Óptica pura y aplicada", 2014, vol. 47, núm. 1, p. 19-25.