Modelling of a charge control method for capacitive MEMS
Document typeConference report
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Rights accessRestricted access - publisher's policy
Charging of dielectric materials in microelectromechanical systems (MEMS) actuated electrostatically is a major reliability issue. In our previous work we proposed a feedback loop control method that is implemented as a circuit and that allows smart actuation for switches and varactors. In this paper we discuss system-level modeling of MEMS devices including all aspects of the system: proposed control method, charging dynamics and realistic models of the mechanical components of MEMS.
CitationGiounanlis, P. [et al.]. Modelling of a charge control method for capacitive MEMS. A: European Conference on Circuit Theory and Design. "2013 European Conference on Circuit Theory and Design (ECCTD 2013): 8-12 September 2013: Dresden, Germany". Dresden: Institute of Electrical and Electronics Engineers (IEEE), 2013, p. 1-4.
|Modelling of a ... od for capacitive MEMS.pdf||Modelling of a charge control method for capacitive MEMS.pdf||1.725Mb||Restricted access|