PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Rights accessRestricted access - publisher's policy
In this paper, we present the design, fabrication, and measurements of a lens THz antenna that can be fabricated using conventional photolithography and deep reactive etching processes. The antenna is composed of an extended hemispherical silicon lens and a leaky wave waveguide feed. Both elements are fabricated using silicon micromachining techniques, enabling the fabrication of future large antenna arrays with a parallel process. To show the concept, a first antenna prototype has been fabricated using this fabrication process. Measurements obtained at 550 GHz are presented.
CitationLlombart, N. [et al.]. Silicon micromachined lens antenna for THz integrated heterodyne arrays. "IEEE Transactions on Terahertz Science and Technology", Setembre 2013, vol. 3, núm. 5, p. 515-523.
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