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We present a methodology to characterize BAW
resonators both linearly and nonlinearly. The procedure uses physical modeling along with measurements that exploit different
manifestations of the nonlinear phenomena to identify the dominant linear and nonlinear material properties. Such methodology allows obtaining consistent nonlinear material
parameters by use of two independents measurements.
CitationRocas, E. [et al.]. A consistent methodology to characterize BAW resonators. A: IEEE International Ultrasonics Symposium. "2012 IEEE International Ultrasonics Symposium". Dresden: 2012, p. 547-550.
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