Multilayer ISFET membranes for microsystems applications
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The fabrication of microsystems in which chemical measurements play a role make the on-chip combination of chemical sensors and signal processing circuitry highly desirable. Chemical sensors use sensitive layers which are not a part of MOS devices and in this sense, the determination of the best sensors and technological processes to achieve good integrated smart sensors is very important. In this paper a study of compatibility of ISFET chemical sensors and CMOS circuitry is presented for application to biomedical microsystems.
CitationCané, C. [et al.]. Multilayer ISFET membranes for microsystems applications. "Sensors and actuators B. Chemical", 01 Setembre 1996, vol. 1-3, núm. 136-140, p. 35-36.