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A low-power-consumption out-of-Plane electrothermal actuator
dc.contributor.author | Girbau Sala, David |
dc.contributor.author | Llamas Morote, Marco Antonio |
dc.contributor.author | Casals Terré, Jasmina |
dc.contributor.author | Simó Selvas, Francisco Javier |
dc.contributor.author | Pradell i Cara, Lluís |
dc.contributor.author | Lázaro Guillén, Antoni |
dc.contributor.other | Universitat Politècnica de Catalunya. Departament de Teoria del Senyal i Comunicacions |
dc.date.accessioned | 2008-03-06T12:48:35Z |
dc.date.available | 2008-03-06T12:48:35Z |
dc.date.created | 2007-06 |
dc.date.issued | 2007-06-30 |
dc.identifier.citation | Girbau, D.; Llamas, M. A.; Casals, J.; Simó, X.; Pradell, L.; Lázaro, A. A low-power-consumption out-of-Plane electrothermal actuator. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, vol. 16, núm. 3, p. 719-727. |
dc.identifier.issn | 1057-7157 |
dc.identifier.uri | http://hdl.handle.net/2117/1780 |
dc.description.abstract | This paper proposes a new vertical electrothermal actuator. It can be considered as a hybrid between the traditional in-plane buckle-beam actuator and the vertical hot-cold actuator. It is here referred to as vertical buckle beam. At identical dimensional and bias conditions, it features a displacement larger than that of other vertical electrothermal actuators proposed so far in the literature. The actuator performance is demonstrated by means of an analytical model along with finite-element analysis. It is applied as a driving element in parallel-plate capacitors, where it is validated and its advantages in terms of power consumption are demonstrated empirically. |
dc.format.extent | 719-727 |
dc.language.iso | eng |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
dc.subject | Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques |
dc.subject.lcsh | Microelectromechanical systems |
dc.subject.lcsh | Capacitors |
dc.subject.other | Capacitors |
dc.subject.other | Finite element analysis |
dc.subject.other | Low-power electronics |
dc.subject.other | Microactuators |
dc.subject.other | MEMS |
dc.subject.other | parallel-plate capacitors |
dc.subject.other | Finite-element analysis |
dc.subject.other | Vertical hot-cold actuator |
dc.subject.other | In-plane buckle-beam actuator |
dc.subject.other | Electrothermal actuator |
dc.subject.other | Low-power-consumption |
dc.title | A low-power-consumption out-of-Plane electrothermal actuator |
dc.type | Article |
dc.subject.lemac | Microelectromechanical systems |
dc.contributor.group | Universitat Politècnica de Catalunya. RF&MW - Grup de Recerca de sistemes, dispositius i materials de RF i microones |
dc.description.peerreviewed | Peer Reviewed |
dc.rights.access | Open Access |
local.personalitzacitacio | true |
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