This paper proposes a new vertical electrothermal actuator. It can be considered as a hybrid between the traditional in-plane buckle-beam actuator and the vertical hot-cold actuator. It is here referred to as vertical buckle beam. At identical dimensional and bias conditions, it features a displacement larger than that of other vertical electrothermal actuators proposed so far in the literature. The actuator performance is demonstrated by means of an analytical model along with finite-element analysis. It is applied as a driving element in parallel-plate capacitors, where it is validated and its advantages in terms of power consumption are demonstrated empirically.
CitationGirbau, D.; Llamas, M. A.; Casals, J.; Simó, X.; Pradell, L.; Lázaro, A. A low-power-consumption out-of-Plane electrothermal actuator. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2007, vol. 16, núm. 3, p. 719-727.
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