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In this paper, we describe the characterization of
silicon micro-lenses fabricated by two different techniques, one
using laser micromachining and the other developed using
photolithographical techniques. The micro-lens antenna patterns
were measured from 530 to 600 GHz and the characteristics of
the two lenses compared.
CitationAlonso, M. [et al.]. Silicon micro-lens antennas for THz integrated arrays. A: International Conference on Infrared, Millimeter, and Terahertz Waves. "Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011. Proceedings". Houston: IEEE, 2011, p. 1.
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