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Dielectric charge control in electrostatic MEMS positioners/varactors
dc.contributor.author | Blokhina, Elena |
dc.contributor.author | Gorreta Mariné, Sergio |
dc.contributor.author | Lopez, David |
dc.contributor.author | Molinero Giles, David |
dc.contributor.author | Feely, Orla |
dc.contributor.author | Pons Nin, Joan |
dc.contributor.author | Domínguez Pumar, Manuel |
dc.contributor.other | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
dc.date.accessioned | 2012-06-25T16:24:07Z |
dc.date.created | 2012-06 |
dc.date.issued | 2012-06 |
dc.identifier.citation | Blokhina, E. [et al.]. Dielectric charge control in electrostatic MEMS positioners/varactors. "Journal of microelectromechanical systems", Juny 2012, vol. 21, núm. 3, p. 559-573. |
dc.identifier.issn | 1057-7157 |
dc.identifier.uri | http://hdl.handle.net/2117/16137 |
dc.description.abstract | A new dynamical closed-loop method is proposed to control dielectric charging in capacitive microelectromechanical systems (MEMS) positioners/varactors for enhanced reliability and robustness. Instead of adjusting the magnitude of the control voltage to compensate the drift caused by the dielectric charge, the method uses a feedback loop to maintain it at a desired level: the device capacitance is periodically sampled, and bipolar pulses of constant magnitude are applied. Specific models describing the dynamics of charge and a control map are introduced. Validation of the proposed method is accomplished both through discrete-time simulations and with experiments using MEMS devices that suffer from dielectric charging. |
dc.format.extent | 15 p. |
dc.language.iso | eng |
dc.subject | Àrees temàtiques de la UPC::Enginyeria electrònica::Microelectrònica |
dc.subject.lcsh | Microelectronics |
dc.subject.lcsh | Microelectromechanical systems |
dc.title | Dielectric charge control in electrostatic MEMS positioners/varactors |
dc.type | Article |
dc.subject.lemac | Sistemes microelectromecànics |
dc.subject.lemac | Microelectrònica |
dc.contributor.group | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
dc.identifier.doi | 10.1109/JMEMS.2011.2182500 |
dc.description.peerreviewed | Peer Reviewed |
dc.rights.access | Restricted access - publisher's policy |
local.identifier.drac | 10613955 |
dc.description.version | Postprint (published version) |
dc.date.lift | 10000-01-01 |
local.citation.author | Blokhina, E.; Gorreta, S.; Lopez, D.; Molinero, D.; Feely, O.; Pons, J.; Dominguez, M. |
local.citation.publicationName | Journal of microelectromechanical systems |
local.citation.volume | 21 |
local.citation.number | 3 |
local.citation.startingPage | 559 |
local.citation.endingPage | 573 |
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