Rights accessRestricted access - publisher's policy
A broadband 0º/180º phase switch based on a slotline-coplanar-waveguide cross loaded with two MEMS switches in opposed (ON/OFF or OFF/ON) states, is reported. The fabrication was made on high-resistivity silicon substrates using the FBK-irst and LAAS-CNRS surface micromachining processes, showing a high repeatability. The measured phase shift is 180º +0º/-7º in the extremely wide frequency range 1–30 GHz.
CitationLlamas, M. [et al.]. A highly-repeatable, broadband 180º phase switch for integrated MEMS processes. A: International Symposium on RF MEMS and RF Microsystems. "12th International Symposium on RF MEMS and RF Microsystems". Atenes: 2011.
All rights reserved. This work is protected by the corresponding intellectual and industrial property rights. Without prejudice to any existing legal exemptions, reproduction, distribution, public communication or transformation of this work are prohibited without permission of the copyright holder. If you wish to make any use of the work not provided for in the law, please contact: firstname.lastname@example.org