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Zeolite-coated interdigital capacitors for humidity sensing
| dc.contributor.author | Urbiztondo, M. |
| dc.contributor.author | Pellejero, I. |
| dc.contributor.author | Rodríguez Martínez, Ángel |
| dc.contributor.author | Pina Iritia, María Pilar |
| dc.contributor.author | Santamaría Ramiro, Jesús Marcos |
| dc.contributor.other | Universitat Politècnica de Catalunya. Departament d'Enginyeria Electrònica |
| dc.date.accessioned | 2011-10-27T17:51:25Z |
| dc.date.available | 2011-10-27T17:51:25Z |
| dc.date.created | 2011-05-06 |
| dc.date.issued | 2011-05-06 |
| dc.identifier.citation | Urbiztondo, M. [et al.]. Zeolite-coated interdigital capacitors for humidity sensing. "Sensors and actuators B. Chemical", 06 Maig 2011, vol. 157, núm. 2, p. 450-459. |
| dc.identifier.issn | 0925-4005 |
| dc.identifier.uri | http://hdl.handle.net/2117/13692 |
| dc.description.abstract | Inter-digital capacitors (IDCs) with electrode gaps of 10 or 50 microns have been coated with zeolite films consisting of different zeolites with Si/Al ratios ranging from 1.5 (zeolite A) to infinite (silicalite). The performance of the sensor in the measurement of humidity has been related to the electrical properties of the zeolites (relative permittivity, ɛr), which in turn is a function of their Si/Al ratio. With zeolites of a high Al content the limit of detection was under 0.5 ppmV. |
| dc.format.extent | 10 p. |
| dc.language.iso | eng |
| dc.subject | Àrees temàtiques de la UPC::Enginyeria de la telecomunicació::Radiocomunicació i exploració electromagnètica::Circuits de microones, radiofreqüència i ones mil·limètriques |
| dc.subject.lcsh | Zeolites |
| dc.title | Zeolite-coated interdigital capacitors for humidity sensing |
| dc.type | Article |
| dc.subject.lemac | Zeolites |
| dc.contributor.group | Universitat Politècnica de Catalunya. MNT - Grup de Recerca en Micro i Nanotecnologies |
| dc.identifier.doi | 10.1016/j.snb.2011.04.089 |
| dc.description.peerreviewed | Peer Reviewed |
| dc.rights.access | Restricted access - publisher's policy |
| local.identifier.drac | 5907271 |
| dc.description.version | Postprint (published version) |
| local.citation.author | Urbiztondo, M.; Pellejero, I.; Rodriguez, A.; Pina, M.; Santamaría Ramiro, J. |
| local.citation.publicationName | Sensors and actuators B. Chemical |
| local.citation.volume | 157 |
| local.citation.number | 2 |
| local.citation.startingPage | 450 |
| local.citation.endingPage | 459 |
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