Polymer-based micromachined rectangular coaxial filters for millimeter-wave applications
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Tipus de documentArticle
Data publicació2011-04
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Abstract
In this paper, micromachined devices for millimeter-wave applications at U- and V-bands are presented. These structures are
designed using a rectangular coaxial line built of gold-coated SU-8 photoresist layers, where the coaxial center conductor is
suspended in air by stubs. The designs include a stepped coplanar waveguide (CPW)-to-coaxial transition at 63 GHz, with an
insertion loss of 0.39 dB at 67.75 GHz and a return loss better than 210 dB across the band of operation between 54.7 and
70.3 GHz. Two filters have been designed; one centered at 42 GHz with a 10% bandwidth, and another at 63 GHz with a 5%
bandwidth. Measured insertion losses of 0.77 and 2.59 dB were obtained for these filters, respectively. Measured return loss
lower than 13.8 dB over the passband was achieved for both designs. The structures presented in this paper involve a low-cost
manufacturing process suitable to produce integrated subsystems at millimeter waves.
CitacióJaimes-Vera, A. [et al.]. Polymer-based micromachined rectangular coaxial filters for millimeter-wave applications. "International journal of microwave and wireless technologies", Abril 2011, vol. 3, núm. 2, p. 115-120.
ISSN1759-0787
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