Carboxylated multi-wall carbon-nanotubes (CNTs) monolayers are integrated on microfabricated all-polymer micro-electromechanical systems (pMEMS) resonator bridges on glass substrates. The structural layer of the MEMS bridges is a multilayer blended conductive polymer based on
poly(3,4-ethylenedioxythiophene):poly (styrenesulfonate) (PEDOT:PSS) to which functionalized CNT monolayers are electrostatically attached. The resonance frequency (fres) of electrostatically
actuated pMEMS bridges was measured as a function of their length (32–67 lm) for different multilayer compositions. A significant increase in fres and quality factor (Q) with the addition of CNT monolayers to the PEDOT:PSS structural material is observed, demonstrating that CNT
monolayers can be used to modulate pMEMS resonator properties.
CitationSousa, P. [et al.]. Microelectromechanical resonators based on an all polymer/carbon nanotube composite structural material. "Applied physics letters", 25 Juliol 2011, vol. 99, núm. 4, p. 1-3.
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