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This paper presents a high-bandwidth capacitance estimation and driving circuit especially tailored for its use with MEMS electrostatic actuators. The circuit can be integrated as a part of a system comprising
an electrostatic actuator to provide self-testing and failure prediction capabilities and also as a simple and
low-cost actuator dynamics characterization system capable of measuring both periodic and nonperiodic movements.
CitationFernandez, D.; Madrenas, J.; Cosp, J. A self-test and dynamics characterization circuit for MEMS electrostatic actuators. "Microelectronics reliability", Març 2011, vol. 51, núm. 3, p. 602-609.
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