Hot spot detection in integrated circuits laterally accessing to the substrate

Abstract

Thermal management of nano estructures requires the use of temperature monitoring strategies. In this work we expose a strategy bases on sensing the heat-flux within the chip substrate with a probe-laser beam. As the beam passes through the die, it experiences a deflection directly proportional to the heat-flux found along its trajectory (Internal Interfrared-laser deflection technique, IIR-LD) . As application example, we expose how hot spots can be detected in Integrated Circuits.