In this work, we show that macroporous silicon consisting of periodic arrays of etched pores is a feasible alternative for synthesis of 2D and 3d metallic microstructures due to its flexibility in the definition of complex geometries bulk. In addition macroporous silicon features full three-dimensionality, well controlled pore distribution and growth, and scalable dimensions (0.5-100 μm). We present here the fabrication of 3D Ni micro-structures by electroplating of macroporous silicon templates. The given approach can be applied for depositions of different metals and in more complicated template-structures.
CitationHernandez, D. [et al.]. Template fabrication of 3D metallic microstructures by electrochemical etching and electroplanting. A: Encuentro Franco-Español de Química y Física del Estado Sólido. "VI Encuentro Franco-Español de Química y Física del Estado Sólido". Tarragona: 2010.
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