This paper extends our previous work on the selective
excitation of mechanical vibration modes in MEMS devices using
pulsed digital oscillators (PDOs). It begins by presenting extensive
simulation results using the set of iterative maps that model the
system and showing that it is possible to activate two or three spatial
modes (resonances) of the mechanical structure with a PDO.
The second part of this paper presents experimental results corroborating
the theory and simulation results. It is shown that it is
possible to separately excite vibration modes of the device by setting
a few parameters of the PDO structure such as the sampling
frequency and the sign of the feedback loop.
CitationRicart, J. [et al.]. Control of MEMS vibration modes with pulsed digital Oscillators. Part II: simulation and experimental results. "IEEE transactions on circuits and systems I: regular papers", Agost 2010, vol. 57, núm. 8, p. 1879-1890.
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