The aim of this paper is to show that it is possible
to excite selectively different mechanical resonant modes of a
MEMS structure using pulsed digital oscillators (PDOs). This
can be done by simply changing the working parameters of the
oscillator, namely its sampling frequency or its feedback filter. A
set of iterative maps is formulated to describe the evolution of the
spatial modes between two sampling events in PDOs. With this
lumped model, it is established that under some circumstances
PDO bitstreams related to only one of the resonances can be
obtained, and that in the anti-oscillation regions of the PDO
the mechanical energy is absorbed into the electrical domain on
average. The possibility of selecting for a given resonant frequency
the oscillation and anti-oscillation behavior allows one to obtain
oscillations at any given resonant mode of the MEMS structure.
CitationBlokhina, E. [et al.]. Control of MEMS vibration modes with pulsed digital oscillators: part I—theory. "IEEE transactions on circuits and systems I: regular papers", Agost 2010, vol. 57, núm. 8, p. 1865-1878.
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