An Introduction to micro electro mechanical systems (MEMS)

Abstract

The remarkable progress ofMEMS (Micro Electro Mechanical Systems) research has reached the stage where practical applications are intensely pursued. Based on highperformance systems cornmercial products have made remarkable progress in many fields. This paper discusses the underlying principIes for MEMS, going over the materials and processes used for their fabrication. It also presents two state of the art examples, under development in the industry. A brief discussion of terminology is also included.